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In has been found for undoped and B-doped a-Si : H films that at T > 120C the kinetics of the dark conductivity (d) alteration during and after the illumination is not monotonic. There are fast and slow processes of d alteration of opposite signs. By the variation of the duration and the intensity of illumination or of the tempetature of the film it is posible to separate the fast or slow relaxation processes of d that are described by a stretched exponential function. Nomonotonic relaxation of d is described by a sum of two of the stretched exponentials, of which parameters and depend both on characteristics of a films as well as on temperature, time period and intensity of illumination. The nature of nommonotonic relaxation is discussed.

4 Физика и техника полупроводников, 1997, том 31, №

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