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Ha paax pyoc

yo Bac ao CETPOCO AMTTAHCA OPOBOHOBX HAHOETEPOCTPTP Ceaoc:

01.04.10 a oypooo ABTOPEEPAT ccepa a cocae yeo cee oopa o - aeaecxay Ca-eepyp 2007 Paoa oea Ca-eepypco ocyapceo epoexeco yepcee TȔ . B.. oa (ea) Hay ocya oop o-aeaecx ay, poeccop Coooo A.B.

Oae ooe:

aypea ocyapceo pe P, oop o-aeaecx ay, poeccop Heo C.A.

oop o-aeaecx ay, poeccop Hoo .B.

oop execx ay, poeccop ye A.M.

Beya opaa o-exec cy . A.. oe PAH aa ccepa cococ " " 2007 . aco a acea ccepaooo coea 212.238.04 Ca-eepypcoo ocyapceoo epoexecoo yepcea TȔ . B.. oa (ea) o apecy: 197376, Ca-eepyp, y. po. ooa, 5.

C ccepae oo oaoc oee yepcea.

Aopeepa paoca " " 2007 .

e cepeap ccepaooo coea Moo B.A.

OA XAPATEPCTA PAOT Ayaoc e:

Cpeeoe pae aoexoo, aaeec ocee oopa ece, peo oe ooo apae oypoooo epo aoepo, oopa xapaepyec epexoo cooa aocpyyp c oeo paepoc, coepax aoe , aoe aoe o. B o c ocaoo ocpo cae opoc o aoce aooeo, paep oopx epc ea eca aox coe.

Hepep exooec popecc peye papao aeax copeex eoo aaa ax aopaepx cpyyp, a ae coepecoa cyecyx eoo opo. B o apae ae oceee pe, ocoo, ea oac papao eoo yaa aooeo c cooae pax oa epoo poco.

oo opo opooeco cpyyp, oypooooo popa, oeo, peaee aee ee aoca eo epoo cce.

B acoe paoe paac aace eo cceoa xapaepa aoo-paepx eepocpyyp, opaec a aeaecoe oepoae oepy opaoy ax aoapoaoo cepea. Aaca cepoco (cepoco oo poooc) ec, o cyecy, oeceo eoo, oc epapya xapaep oeao ee oae oooc xapaepa apooo coco popo, o o aaa acoe pao paa ee pee aoeepocpyyp opaaac, a pe cee, pec aao cepeax ax. Ocycoao eaoe oae eopeecx oco aaca aoo-paepx cpyyp, e o poeeo cceaecx cceoa ayax aepao cpyyp aoepo.



B ocoe paaeoo ao paoe ooo ayoo apae - cepoco aaca aoeepocpyyp - e ceoe oepoae peyao epe c yeo aoo-exaecx eo, pcyx paccapae oea. Co e paa, acoc, eop caoapo eoco cepoco epoax eepocpyyp c ao a (), yaa paepoe aoae ocee apa e pea oeao ep epoao oypooe, a ae eop eoopooo ype ooc epeecx coco caoopayxc aox oe. oecoe peee cex aacx eo paax aoapoao cce c ocey oepoae ooo ooe opee ocoe epoe coca aoeepocpyyp, acoc, ae aee x, a pap epeecx o a eepopae, ooee ypoe aoa ooc epeecx coco.

oypoo A3B5 x epe pacop c ao aepao oo- aoepo, oao, ecop a o, p apaepo, opeex xapaepc popo a x ocoe, e ycaoe c peyeo cee ooc. B acoc, paec cex coee ao py (a cee cce GaAs/AlAs) o cx op e ocoepx cee o ee papa epeecx o a eepopae. pa oo poec ocyc eoo peooo ee epe. Bece c epap o ec e apaepo, opee paoy popo a oypooox eepocpyypax.

Oco epec pecae eepoccea a ocoe epx pacopo InGaAs/GaAs. B acoee pe a ccea ao coyec coa ox aepo a ocoe apex aox aox oe, oppoae oopx pocxo aoap e caoopaa. Tae pop cya eepa ye oac eo papacoo aaoa ye poo pec oooo-oecx x c. Coae oeco cce aoc ax aoaepao cpyyp ypae x epo cepo ec ayao aae aoepo.

Oco oea cceoa paoe c oypoooe eepocpyyp a ocoe coee A3B5, ae eepoepexo AlxGa1-xAs/AlyGa1-yAs, aoe InxGa1-xAs/GaAs, caoopayec aoe o InAs/GaAs InGaAs/GaAs, caae co aox oe InAs/GaAs. C e eocpa oooce papaoax eo ac cepeo a poeea a oecex aox ax ccee InGaN/AlGaN.

e pao ac papaoa pae eoo cepoco aaca oypooox aoeepocpyyp c yeo aoo-paepx eo xapaepa x epoecx apaepo, coae cce aoc ax eepocpyyp opo ocox apaepo x epooo cepa.

ceoa apae ae a:

oyee peoo opa o papax epeecx o apex aox ax a ocoe epx pacopo InxGa1-xAs;

cepeaoe opeeee ooc epeecx coco caoopayxc aox oax InAs/GaAs;

yee exao axaa cc ocee apa acco aox oe.

B cooec c yaao e paoe peac ceye aa:

1. Papaoa coae aoapoao cce aacx cceoa oypooox aepao, cpyyp popo.

2. Papaoa ox epex eo popax aopo, pacpx opyx oooc aaco cepoco aoeepocpyyp.

3. Papaoa aeaeco oe caocoacoaoo pee ypae peepa yaccoa pacea o-apax xapaepc oypooox aocpyyp, coepax aoe .

4. Coae popaoo oecee ceoo pacea poe oepa coox ocee apa oypooox cpyypax c ooo aoo o.

5. poeee peox epe oepoa oapax xapaepc oypooox eepocpyyp c oo ao a InxGa1-xAs/GaAs o ce aaoe x ceoopoo poca c e ycaoe ox aooepoce ee x ex epoecx apaepo, acoc, e papa epeecx o a eepopae.

6. Coae eoa aoc ypeo ooc epeecx coco acca caoopayxc aox oe a ocoe cepoco aaca.

7. Cpaea oea aecx xapaepc cocooc aaa ap acco aox oe caa coe caoopayxc aox oe.

8. Oocoae oooce coae eoa eocpeceoo ae poecca axaa ocee apa acc aox oe.

Haya oa pao:

1. peoea aeaeca oe, coya e aooexaec oxo p oca epeecoo cepa coox cax ocee apa oac aoo , ooa oca pocpaceoe pacpeeee ocee apa epoax oypooox eepocpyypax c ao a a ocoe caocoacoaoo pee ypae peepa yaccoa.

2. poeeo cceaecoe cceoae apex aox eepocpyypax InxGa1-xAs/GaAs aaoe ceoopoo poca (0 < x < 0.29) eoo caoapo eoco cepoco. caoe oe aooepoc oee epooo cepa yaao eepoccee, o ce opeeea acoc e papa o poooc o cocaa epoo pacopa .

3. oaaa po cax, apeoacx coox ocee apa oac aoo p oppoa aaeoo o-apax epex po oepa ocee apa aoeepocpyyp c aoo o.

4. peoe coco opeee ooc epeecx coco acca caoopayxc aox oe aaa cepo poooc, cx p pax poex ceex.

5. Ha ocoe epe eepaypx cepo aaca caax coe caoopayxc aox oe InAs/GaAs opeee apaep x epeecoo cepa.

6. Coo ecaoapo eoco cepoco apecppoa epexoe poecc axaa ocee apa acc caoopayxc aox oe. peoe peaoa o eo eo DLTS axaa.

paeca eoc pao aaec yye cyecyx pecae o yaeax cocax epox aoopaepx coco aoeepocpyypax, xc ao o epce p pooce popo copeeo oo- aoepo, a ae paccapaxc aece ex oypooox cpyyp yyx popo ooepo cpo.

Papaoaa ccea aoc oypooox eepocpyyp (eepoepexoo, aox aox oe) o peyaa aacx epe, oex caoapx ecaoapx peax p pax poex apex, acoax eepaypax, ooa opee ocoe apaep x epooo cepa.

Coao popaoe oeceee, ooee oepoa epoece xapaepc eepocpyyp, coepax oe o paepoc.

oye oecee acoc o papy o poooc o cocaa epoo pacopa apex aox eepoccee InxGa1-xAs/GaAs (0 < x < 0.3), eoxoe p papaoe cooex popo oo- aoepo c aa apaepa.

oye oecee ae o ee apa, ayypyeoo acco aox oe caa coe caoopayxc aox oe acoc o eepayp.

peoe eo eocpeceoo opeee aecx xapaepc poecca axaa ocee apa acc caoopayxc aox oe InAs/GaAs, o ao papao ooo ooe aoax ycpoc a aox oax.

Haye ooe, oce a ay:

1. Meo cepoco aaca, oop oocc caoap eo o-apax xapaepc, acoa cepoco poooc ecaoapa eoca cepoco epexox poecco cc axaa, c e cpeco xapaepa aoeepocpyyp. x oecoe cooae coeco c aeaec oepoae ae peoy oecey opa o ocox epoecx apaepax eepoepexoo, aox acco aox oe c yceoc 1012 c-3 o oepa, papeee o 5 B o ep 1 o oopae.

2. ceoe oepoae cepeax o-apax xapaepc a ocoe caocoacoaoo pee ypae peepa yaccoa ooe opee ocoe apaep epoax oypooox aoeepocpyyp, coepax aoe , a eo: yy , po epye pec ocox ocee apa, pocpaceoe pacpeeee oeaa epecoo o, ey papa epeecx o a eepopaax, ep ypoe paepoo aoa cooecye ooe y.

3. Pap epeecx o a eepopae oypoooo ap opeeec exooe paa eepoepexoa, oo eepocoe paccoacoae epoo peeo. paec coyex apex aox eepoccee InxGa1-xAs/ GaAs c coepae In o 6.5 o 29% acoc e papa o poooc o cocaa epoo pacopa ocaec apao ye a EC = 0.85x - 0.3x2 c opeoc e oee B peeoo cocaa o .

4. epee eepaypx cepo poooc epae aco ooe eocpeceo opee pacpeeee ooc epeecx coco acca aox oe, a c oo ceoo oepoa oy apaep ype. caoopayxc T InAs/GaAs pacpeeee ooc coco o ayccooy, o ocec eo eoopooo ype cece yya paepo, eoep cocaa oex oe.

5. paoe caae co caoopayxc aox oe pa po aoo oy eo aaa oce apa. p x eepaypax caae co coco ayypoa ap, o ee cooca c apo acca aox oe.

6. Hecaoapa eoca cepoco epexox poecco axaa ocee apa ooe ep poecc axaa ocee aoy oy opee aece xapaepc oo poecca. coe pecpa epee aaca epexox poecco axaa ec cee oepa coox ocee apa, o ocaec oeee co aox oe oac oeoo apa aocpyyp.

Apoa peyao pao Ocoe peya pao oaac ocyac a ceyx oepex: III Bcecoo coea "a exoo pooox oypooo" (Maxaaa, 1986); XII Bcecoo oepe o e oypooo (e, 1990); epo aoao oepe "ee oypooax" (C.- eepyp, 1992); 23 Int. Symp. on Compound Semiconductors (St.Petersburg, Russia, 1996); 5th, 9th, 12th, 14th Int. Symp. "Nanostructures: Physics and technology" (St.Petersburg, Russia, 1997, 2001, 2004, 2006); Fourth Int. Conf. "Material Science and Material Properties for Infrared Optoelectronics" (Kiev, Ukraine, 1998); II IV Meyapo. o. o ce epe (C.-eepyp, 1999, 2001); 12-o eyapoo ayo oepe Maeaece eo exe exoox (Be Hoopo, 1999); XI Poccco Coye o pacpoo epoo poco aaec eoa cceoa epx e (PM-99) (epoooa, 1999); X Meyapoo coye "Toe e epoe" (poca, 1999); XX Meyapoo oepe "Peacaoe e epx eax" (Bopoe, 1999); X- Meyapoo oepe Baoece eeo eypye e epx eax (Tya, 2001); Bcepoccco ayo oepe "a oypooo oyeao" (-2002) (C.-eepyp, 2002); 5-th Session of the V.A.Fock School on Quantum and Computational Chemistry and 1-st AllRussian Meeting on Electronic Structure of Nanomaterials (Novgorod the Great, 2002); 10th International Conference on Silicon Carbide and Related Materials (Lyon, France, 2003); III, IV VI Meyapox ayx oepex X epoo ea copeee po- aoexoo (cooc, 2003, 2004, 2006); X XII Meyapox ayo-execx oepex Bcoe exoo poeoc Pocc (Maepa ycpoca yoao epo pooo) (Moca, OAO HT Texoa, 2004, 2006); XXI Int. Conf. on Relaxation Phenomena in Solids (Voronezh, Russia, 2004); VI VII Meyapox oepex Oo-, aoepoa, aoexoo pocce (oc, 2004, 2005); IX X Coyax Haoa aoepoa (H Hoopo, 2005, 2006); 2- Meyapoo oepe o e epox aepao (aya, 2005); Meyapoo ayo-execo oepe Haya, opaoae oeco XXI ee (Ca-eepyp, 2006); eeox ayo-execx oepex poeccopco-peoaaecoo cocaa CT (1997-2007).

ya. o ee ccepa oyoao 46 ayx pao, x - 20 cae (10 cae, oyoax eyx peepyex ayx ypaax ax, peoeoax BA P), 26 pao aepaax pyax cecox, cepocccx eyapox ayx ayo-execx oepe coyo.

Cpyypa oe ccepa. ccepa coco ee, ce a, ae cca epayp, aeo 290 aeoa. Ocoa ac pao oea a 274 cpaax aocoo eca. Paoa coep 118 pcyo 5 a.

COEPAHE PAOT Bo ee ao oocoae ayaoc e ccepa, ocaea e aa oa xapaepca pao, a ayy oy paecy eoc oyex peyao, copypoa aye ooe, oce a ay.

B epo ae pooc acca eoo cepoco aaca. Bce eo ycoo oy paee a: caoape (eo o-apax xapaepc), acoe (eepaype cep eoc poooc), ecaoape (oepeca peaca eoca cepoco epexox poecco, DLTS). Oeaec, o, ecop a paoopae eoo epex oeo, eppea aacx epe ocoaec a ecox ox oex, oop oocc apepa eoc oac oeoo apa oypooa, pee ooo oee aocaoe pee. Aapyc p accecoo eoa o-apaoo popoa ocoeoc eo pee epe eepocpyyp c aopaep co. poeea oea pocpaceoo papee o-apaoo eoa , c c , ocyaec poea cyeaecoo papee. Ocyac poe eppea peyao cepoco aaca apepo o p-n-epexoo, coepax aoo-paepe co.





Bo opo ae paccope ocoe coca eepoepexoo, pee x oe apa. aeoe ae yeeo opocy pa o-apaoo (C-V) eoa opeee epoecx apaepo eepocpyyp. poee aa aaeoo po oepa n(w) ocox ocee apa ooo eepoepexoa. Opaeo ae a o ocoeco, o ea epeco poaeoc ee pae ae o oe copo eepopa, ooy paoa opaoa peyao C-Vpopoa -S C3 dC n(w) =, w =, (1) C q0S2 dV e w pa oac oeoo apa, peeo eepoepexoa oaaec eoo. peoe coco occaoe peaoo oepaooo po a ocoe epaoo poeyp.

Oca ocoe cepeae eo eopeece oe opeee e papa epeecx o a eepopae, poeea x cpaea oea.

ooo opeee e papa o a eepoepexoe cpoeoo eepoepexo apa ooc oepoae C-Vxapaepc ye ceoo pee ooepoo ypae yaccoa. Co e coaa opaa popaa pacea, peyao pao oopo ec pacpeeee o ye eepocpyyp epocaecoo oeaa (x), coox ocee apa n(x), a ae epecoo o acoc o poeoo ape.

C oo o-apaoo popoa yac oe eepoepexo AlxGa1-xAs/AlyGa1-yAs pax cocao pao exoo paa, coyee p ooe ceooo aepx oo.

Oapyeo, o oepaoe po pax p, 1016c-p, 1017 c-o oo o e cep opa2.0e+2.o, paex eoo oao ac, aeo oaI 1.5e+1.5 c py o pya a o ye aea eepoepexoa, a o ope oac ooae oce apa (Pc. 1). B cpae c II 5.0e+0. cpyypa eepoepexo, paee eoo MOVPE (aoaa ac eaoopa0.0.ecx coee), e pa0.0 0.2 0.4 0.6 0.ec ee po ox, epa ocox ocee apa. Xapaepa oepaoPc. 1. Cpaee poe oa caa, oeaa a oac epa ocee apa ooae oee ecpyyp, paex eoo epoepexoa cooaeceMOCVD (I) oao ax MOVPE-cpyyp, ea pce (II). cpyyp (I) oy opa 2030 oo ea ooa (o).

oepoaac c oo pee ypae yaccoa. Ta opao, poeocppoao, o o-apaoe popoae ooe oeo cpo oeceo oxapaepoa aeco eepoepexoa, oopooc cpyyp o oa ac opee ocoe epoece apaep eepocpyyp.

Tpe aa ocea papaoe aeaeco oe pacea o-apax xapaepc poe oepa coox ocee apa epoax oypooox aocpyypax, coepax ooe aoe . pee ocaeo aa cooaoc ceoe caocoacoaoe peee eeoo ypae yaccoa d d(x) + 0 (x) = e N (x) - n(x) (2) D dx dx ooepooo ypae peepa pe eo acc - d 1 d i x +V x i x = Eii x, (3) 2 dx dx m*(x) e ND+ oepa ooax oopo, Ei ep i-o ypo aoa, i(x) eo ooa y, V(x) po oeao ep, ya ey papa o a eepopae.

oaao, o cyecy epaype oxo p pee cce ypae (2-3), pa cpooe paeee ocee apa oac aoo a yn, c-epe pexepe [1, 2], oe cpae poyo10oo a oeao ep.

Oao epoao oypoooo aocpyype ee 10eco ae epeecx o eepopa -a a coo yoocoo oaa. ooy e- 10y ca coo coco oae poeyo acc apeoacx co200 300 4co, pocoe cypoae d, yepx pexepx epoPc. 2. Moe aooo a o po apye ce pee cceae- caocoacoaoo pee ypae peepa yaccoa:

co opeoc paceax.

oppeoo pacea oepa ocee apa, pacpeee cax co- paccaa ypae peox ocee apa pea- epa p yeo cee; 2 o oeae epoao o- oepa ocee apa, paccaa aacceco pypoooo eepocpyyp c aoo o a peoe- e p yeo cee; o cooa oe ao- cepeao aae po oepa ocee oo a c eao ep apa cpyype. Oac aocea, a oopx ooa oo a eapxoaa.

y opaaec y, Pc. 2.

B paax ao oe oepa ocee apa paccaec cey opao: epao ac a, coepae aoy y, e eo poec paepoe aoae, coyec eocpece ce pace ooepoo ypae peepa, a ppax oacx a e eo coyec aaccec oxo c paceo oepa coox ocee apa epaa ep c yeo a epeecx o EC - EF - e(x) n(x) = NC F1/ 2 -, (4) kT e Nc ea ooc coco oe poooc; EF ep ypo ep.

Pace oao oepa ocox ocee apa oac ocyecc a ocoe yepo cac epoo c oo pae m*kT n(x) =. (5) i x ln1+ exp EFkT Ei 2 i Cypoae poooc o ce ooa paepoo aoa. o opeeeo eoxooe oeco yo paceo ce (ceo 8000, x ooo 1000 c oee e ao a ao ) paccaex ypoe aoa (16) oce eoxoo ooc ce.

ooee ypo ep paccaoc ypae epoepaoc. Peee cce (2-3) pecae coo epaoy poeypy, a ao ae oopo poooc oceoaeoe peee epeax ypae o oce peyeo ooc o oeay (10-7 B). p pacee yac oopao-aca oepa cooxepoo eoa oa oopo.

pacea o-apao xapaepc pee acaec oxo. aee eoc paccaoc a ocoe coooe C = Q U, pe ppaee apa opeeoc cooec c eopeo aycca.

Ha ocoe peoeo aeaeco oe papaoaa popaa pacea o-apax xapaepc oypooox aocpyyp c ooo . epec ooae coa a ae paeco oeo-opepoao cce popapoa LabVIEW.

Bceoe po popa peaoao a e popapoa C++ eo LabVIEW aece aecx oe.

Ha ocoe coepoax C-V xapaepc paccac aae po oepa ocee apa o caap pae oepa o oac oeoo apa (1).

poaapoao e ocox apaepo aox , ax a: pa , pap epeecx o a epecax pa eepoax oace, peax e, a aaeoo po oepa. oaao, o cpaeo eooe eee e papa o poooc (5 B ee) po cyeceoy ee po oepa. o ocoeco ooe cooa o-apa eo ece c aeaeco ooo peooo epe papa o. Cea o o o, o opeoc opeee p (0.25 ) e oaae cyeceoo a coe apaep.

eepa aa ocea oe peyao xapaepa apaepo epooo cepa aox c oo oapax xapaepc.

B aece cceyeoo oea pa eepocpyyp c oo ao a InxGa1-xAs/GaAs, coyee coa, acoc, ox aepx oo a -oac. Bop cceyex aocpyyp oocoa x a aee copeeo yye oo- aoepo, a ae e, o ea aoo eoo apaepa a pap o, ao cce eepoepexoo o acoeo pee ec peeo cycc [3]. Oocea ea papa o poooc cceyeo ccee o pa cepea a cocae o 35 o 84%. pa cyecyeo papoca epaypx ax poaapoaa ocea acoe paoe.

Haocpyyp pae a GaAs ooe n+-a c opeae (001). Poc acax coe pooc o exoo MOVPE peaope opoaoo a AIXTRON. Teepaypa poca cocaa 6500C 7700C. Toa aox a o 6 o 9.5 .

Moa o appoaac aaoe o 6.5 o 29%. Mey aoo o ooo paaac yepa pocoa GaAs na oo 350 . Cepxy aoo ocaac opa co GaAs, ae n-a poooc, oa co cocaa pepo 300 . yepa pocoa oepxoc co paoepo epoa pee o ypo (6-7)1016 c-3. aoe peae e cecepe co GaAs oo 5 ocaac eepoa. Ha oepxoc opao coa peo oaa o aocc co cepepa. Co copo oo ooe oec oa.

Toa acax coe x coca opopoac c oo yxpcao peeoco paoep cooo papee (HRXRD). poe oo, coepae In aox ax opopoaoc eoo opo oo acc-cepoep. ae o oece e eeo eepopa oye eoa poceae epoo poco aooece. o ycaoeo, o paee acae co aox InxGa1-xAs/ GaAs c ypyo ape o ce pao aaoe cocao epoo pacopa. oepa epye pec o ye cpyyp opopoaac eoo o-apax epe poecce epoxecoo pae. cxoe apaep cpyyp ocoe peya epe paceo cypoa Tae 1.

Taa 1. cepeae ae cceoax aocpyyp, coepax apee aoe InxGa1-xAs/GaAs Coca T pa ep Pap o Opae , poca, , caoo poooc, x C ypo, B B 298 0.065 770 9.5 -10.9 299 0.14 770 8.0 -29.0 1308 0.145 650 6.0 -25.0 1303 0.145 650 7.5 -32.1 1309 0.145 650 9.5 -35.1 1296 0.19 770 6.5 -38.3 1297 0.2 650 6.5 -39.5 1306 0.215 770 7.2 -43.7 1307 0.225 770 7.4 -48.8 1300 0.23 770 7.2 -48.5 1301 0.27 770 6.5 -54.6 2305 0.29 650 6.0 -55.3 2Peya oepoa poe oepa cceoax cpyyp c ao a pecae a Pc. 3. oe ac cceoax cpyyp peyae ceo oo yaoc oc paec eaoo cooec ey cepeao oye eopeec pacca po oepa. p o aece ooooo apaepa cooaac oo ea papa o poooc a eepopae. Coaee eopeecx cepeax peyao ceecye a o coo aece cceoax aocpyyp, a o aeaoc coyeo aeaeco oe.

Papaoaa ccea aoc eepocpyyp c ao a a ocoe aaa oepoa C-V-xapaepc ooe opee ocoe epoece apaep ax aoeepocpyyp: epeece ypo aoa epoo po e, x ooe y, oepa ocee apa ooax aoa, pea po a o poooc ooa aeo o, c ayc po ocox ocee apa aoo , coca epoo pacopa , cpoeoe epecoe 4.0e+4.3.5e+3.3.0e+3.2.5e+0.2.2.0e+2.1.5e+0.1.1.0e+1.5.0e-0.0.15 0.20 0.25 0.30 0.35 0.d, Pc. 3. cepeao oyee (o) paccae (coe ) aaee po oepa ocox ocee apa ox n-n-eepocpyypax c oo ao a InxGa1-xAs/GaAs (0.065 < x < 0.3). Coca , x: 1 0.065, 2 0.145, 3 0.2, 4 0.23, 5 0.29. T = 300 K.

oe, a ae acoc epecex xapaepc o poeoo epecoo o eepayp.

Ha Pc. 4 pecae paccae ooe y oo cpyyp. B ooo y eo coco, caoo aoo e, paec e opyec poecce caocoacoa. Ceya pya ypoe, e ooee ep, e oac epeecoo apepa, aoo yooc o caocoacoaoo oeaa Xapp. O x ypoe (pa 4 a Pc. 4) ec apeoaco, eo apa ooo y peyeceo cocpeooe oac aoo . Booe y oee cox coco paea o coo epoa.

Pace oaa, o paccapaex cpyypax oepa ocee apa e ooe aoa, cooecye -n, c caoy ypo, cocae 95% o ce oepa ocee oac aoo (Pc. 5). Ta opao, ooae oco oce apa oppyec oa opao oce, cocpeooe ooe, cooecye caoy aoo n, c-E, B 1.0e+10150 1.0e+100 -50 1.0e+10-1500 1000 1500 2000 25260 280 3001500 20500 1000 320 3260 280 300 320 340 3Points To d, d, Pc. 4. Paccae ooe Pc. 5. Paccaa oepa y: 1 caoo coco; epoo oac aooo 2 opoo ypo; 3 peeo a, coepaeo aoy y ypo; 4 6-o ypo; 5 10-o In0.23Ga0.77As/GaAs: 1 (py) ypo. Booe y pe- cyapa oepa x cae pooo acae 16 ooax paepoo aoa cee o epa a ep- aooo a; 2 (yp) cooecyeo ypo oepa epo ooe aoa. Toa opae paepoo aoa; 3 (o) pacca caocoacoa oepa o opo ooe; oea Xapp. Pace a- (coa ) oepa oo In0.23Ga0.77As/GaAs - ooe, cooecye apepo 7.2 . oacy.

e ypo, a e oepaooo po oppyc oce ooax, cooecyx coooy e, oy paccac aaccec c oo epaa ep (3). Moo yepa, o cyae ooo caoo aoo e ypo cepeao aae po oepa ocox ocee apa oac opaae apa ooo y caoo coco.

Bo cex cceoax cpyypax aac oo o ypoe aoa, ca aoo e. Eo ep p ax ceex a y cocaa epoo pacopa peea Ta. 1 a Pc. 6. Hae eceoo ypo pae ay po p coa cooex oooox aepo, peaaea eoa peyao aocpye o coco popo a aox ax.

Oe, o p ax cocaax In aoo e ypoe oe oaaec e a o poooc EC oac ocx o. po oo ec ae cecepx coe o copoa .

E1, B EC, B 0.ECunstr 0.-0.-ECstr E 0.-0.0.0 0.1 0.2 0.0.0 0.1 0.2 0.3 0.xIn Coca xIn Pc. 6. ooee caoo Pc. 7. Pap o poooc epeecoo ypo E1 a- apex InxGa1-xAs/GaAs pex InxGa1-xAs/GaAs. (o cepe) a y Coa pacea a- o cocaa epoo pacopa .

coc E1 o xIn peooe oaaa ea o, cooew = 7.2 oepa cya 95%-y oepeoy pec a opae #300. epay. ypa pepx-ypa coo- oeyea [3] acoc unstr ecyee ooee ypo Ec ; px-yp paccaep.

str a o model-solid theory Ec.

o peyaa ceo oo cepeax C-Vax opeeea acoc acoo e papa o poooc ceoopo paex apex aox ax InxGa1-xAs/GaAs o cocaa epoo pacopa p oao eepaype (Pc. 7). Ha peaaec apaa apoca papa o poooc InxGa1-xAs/GaAs aaoe cocao 0 < x < 0.3:

EC = 0.85x - 0.3x, (6) e x o In epo pacope , a ep paaec epooax. oyee ae papo o poooc pecae Ta. 1.

Apocpya acoc (6) cpoac c cooae ap oo, pa o ae pay ey opeoc opeee papa o pax cocao x. C oo peaaeo cce xapaepa aox opeoc opeee EC oeaec a 515 B acoc o cocaa .

Cpaee oyex ax cepeax ae papa o poooc apex aox InxGa1-xAs/GaAs c peoeye oope [3] oaae, o ceoopx aox ax ea papa o poooc pepo a 25 % ee, e a eoepeo eepoepexoe. Tao peya xopoo coacyec c eopeec oea ea ceoopa.

Ha poee pace ee p apeeo o ceoopx ypyo apex coe InGaAs a GaAs c yeo eopaooo oeaa, oaeo -a paccoacoa epoo pee ooo acaoo co oo. B aece oco a cooaa eca oe eaoo epoo ea (model-solid theory) [4], pacpocpaea acoe paoe epx pacopo.

Peya paceo oaa, o p apex ca pa apeeo o, pepy, ceoopo paeoo co In0.25Ga0.75As a GaAs yeaec a 10% p 300 K (o 1.08 o 1.18 B).

Baea oa cece a cpoex exaecx ape aepae aoo paceec a oo ex ex po, pe ooa ex po oaaec e oo ex.

Pap o poooc a eepopae In0.25Ga0.75As/GaAs yeaec a 135 B, o pe a pap aeo o yeaec a 28 B. Ta opao, pace c cooae model-solid theory aeceo oepa cepeao apecppoa e, o ypye ape ca, yea py apeeo o aopaepoo co, po yee papa o poooc a eepopae InxGa1-xAs/GaAs.

B o ae oe cepeae peya aa cep o-apax popoa p-n-eepoepexoo InAs/GaAs c caoopayc ao oa.

eepocpyyp pae eoo MOCVD a ooax n+-GaAs. Tp co aox oe apaac cepxy coe n-GaAs oo 448 c oepae epoo 1.71016 c-3, a ae coa p-n epexoa ocaac co GaAs p-a oo 650 oepae 2.51017 c-3. poee cpaeoo aaa o aaoo exoo ooe peepee opa, e coepae co InAs, a ae opae c pe ypao co InAs e peco o opaoa T.

B oac aox eepayp cepeae o-apae xapaepc eepocpyyp c caoopayc ao on, 1011 c-2 Q, 1011 c-5.1.f = 1 1.4.1.3.0.T = 10 2.0.0.1.0 40 80 120 160 2T = 140 T, K 0.0.0 -1.0 -2.0 -3.0 -4.Pc. 9. eee e apa U, B acce aox oe InAs/GaAs o eepayp (acoa Pc. 8. acoc n-U cpyf = 1 ).

yp c caoopayc T InAs/GaAs a acoe ecooo caa f = 1 p pax ee- a InAs/GaAs oapya a ao, o aao a a apaypax ( aoc po coc aaeo oepacee py ooceo pya ocee apa o oopaa ey, pay 11010 c-2).

( ape). aa ee ay o y o eepayp pecaea a Pc. 8. M eppepye a a oepaoo acoc a paeae ocooy pye oyex epox coco T.

Haac cepee a, aac ooe yx o oepaoo acoc o oopa acca aox oe, oce a ocoe aaox pecae epeeco apa eepocpyyp c T. peaaec cooa aaeoe ee ecooec ey co epeo C-V-popoa yo aea acca T oye opa o epeecx ooex ypoe aoa aoo oe.

Ba apaepo eepocpyyp c ao oa ec ea apa, aaceoo oeo T. ae oo apaepa eoxoo, acoc, xapaepa coc aox oe a eeo aoepox aoax ycpoc. Ha Pc. 9 pecaea acoc e apa cpyype, coepae p co epao cax aox oe InAs ape GaAs. Opeeea ea apa T cocaa 51010 c-2 p T = 200 oooo opacaa o 1.21011 c-2 p T = 20 . Bo e pe, aepaa ooc aox oe, opeeea o a poceae epoo poco, a paa 11010 c-2. Ta opao, cepeao ycaoeo, o p x eepaypax a oy aoy oy oe pxoc o 10 epoo.

B ae ae oeaec, o o cpae c aoe o c cyeceo oee co oeo aeaecoo oepoa; cpo aa x o-apax xapaepc a ocoe pexepoo aeaecoo oepoa oa pecaec epeayeo aae. Te oee, o ocoeoc poca T o exay Cpacoo-pacaoa y ae coxaceco cocae cex xapaepc. o oaae, o aaa oa peac cacec eoa, ya oo papoc apaepo, o ee oee ycoe ocpoee pee.

ooy ee oee ao oaaec eoxooc oecoo ecpoa cpyyp c ao oa ce aopo caoapx ecaoapx eoo aaca. a oaao aee, cooae oecx epe eoc poooc ooe cecopoe oxapaepoa epoe coca cpyyp popo c T.

B eco ae pecae peya epe aaa cepo aaca p-n-eepoepexoo InAs/GaAs c caoopayc ao oa. ec e peaaec opa eo opeee y ooc epeecx coco acca aox oe paaec eo apa oya-oya.

Cep aaca epc copyece c cyo epoo ea Texecoo yepcea, . ep. a aopa aac coa aopa epe cepo aaca, aca popaoo oecee eocpeceo oe cex epe a aoapoao oopyoa. epe pooc c cooae RLC-epa HP4284A aaoe aco 1 1 M poo eepaypo epae 10300 K. Ocoeoc papaoaoo aopa aaac o, o ca aaca oo eepaypo e ooo o ep a pe (oo 10) aco oo oece (opa 250) oe o ape, o paoco poee 2500 paox eepaypx o.

P cepo poooc pax poex cee pee a Pc. 10. p ox ceex (|U| > 3 B) cepax aac o po L1. C oee opaoo cee aya caa poxoa epe acy p U = -3.1 B. oce oo opo L2 oc a oeepaypo copoe cepo.

ocoy peepeo opae, e coepae InAs, e aaoc caa ao aaoe eepayp, cae oapyee L1 L2 c cce G/, epoo c epeecx 1.-2.9V ypoe aoa cce-2.6V e, ae aoe -2.8V 1.-2.7V o caa co. -3.3V 0.Opeeea pao Appeyca ep a0.a ypoe, oppyx 0. L1 L2, oe co acea o poeoo 0.cee Urev (Pc. 11). ypo L1 apecppoaa 0 20 40 60 80 100 120 1ep aa eac T, K o 40 o 150 B. M eppepye acoc a Pc. 10. Cep poooc p-nPc. 11 a eyee ooe- eepocpyyp, coepae acc e a ae ep, ec- aox oe InAs/GaAs, p papyeoe cepocoe po- x poex ceex. Tecooc p ao Urev. C oa acoa 1 MHz.

yeee opaoo cee coe epecoe oe, poa co T, oae o o poooc ece c aoo o epx, ypoe ep epeceae epeece ypo aoa o a py, coaa yco oe peoaca epeo e.

pyo po acoc ep aa o poeoo epecoo o oe oyppy exa eepaypoeacoo oapepoo yepoa c yooo ypo. B paoe [5] pooc cceoa aaox opao c caoopayc ao oa InAs/GaAs eoo DLTS. B cepax DLTS yaoc apecppoa oo o , oycoe epeco cce c ypo aoa T p eepaype, o 40 . Co copo oee x eepayp cepe aaac "oa", oopa, o e aopo, oycoea opy poecca yepoa ocee c ocooo oyeoo ypoe aoo oe apy GaAs.

apyc a eco paoe paccyex, oyoax peyx paoax [5], oaae, o L1 eceoc opaae cc ocee c ocooo (Lg) ecox oyex (Le) ypoe acca T, acoc o poeoo cee. Haoee oo o ocooo oyex coco -a yya ep aoa acae aox oe eae eoo o pape , o oa cpyypa o poooc ceecye oy oo yepe. Cao o 110 B o Ea, B 0.0 0.5 1.-1DOS, o.e.

LLg -1-80 Le -L2 -L-1-3.6 -3.2 -2.8 -2.4 -1U, B -1Pc. 11. acoc aaeo Pc. 12. Paccaa cepo ep aa ocee appoooc y ooc a c ypoe aoa acce epeecx coco (DOS) caoopayxc T InAs/ acca caoopayxc T GaAs o poeoo opaoo InAs/GaAs. yp ayccoa cee.

y c apaepa: Em = B, = 18.3 B.

80 B aaex epx aa opaae, ox epax, epeec aop ey oco ep oye coco. aee, oaae, o L2 oec cece cc ocee caax coe InAs. Cooecya ep aa ooo 20 B axoc xopoe coac c ooece epe.

Coec aa Pc. 10 11 ooe peo opa eo opeee ooc coco acca aox oe.

oo p pao poeo cee aya cepa poooc Pc. 10 opyec c cooecye epe aa Ea (Pc. 11), oyeo paa Appeyca. oyaac acoc Pc. 12 opaae oeco ocee apa, yacyx epocc c ypo c ao epe E. o aao c aae poe oepa ocee apa, oop oyaec epepoa C-V-xapaepc, peaae paccapa a pa a aaey (apparent) ooc coco acca eoopox aox oe, opoay pacpeeee ep-paa.

o peyaa opeee ooc coco caoopayxc T InAs/GaAs, pee a Pc. 12, oo a, o aaoe ep -80-30 B e a o poooc aaec ypeoe oyeoe cocoe Le acca aox oe. yE, B e eo, epae ep -130-80 B aeae ocooe cocoe Lg, eee paeoe cece eo ee eoc. a oa L2 accopyec c cce ocee apa aoo caaeo co InAs. oo po o ope oe o ayccooy pacpeee. cpae o po c ye aycca oo opee cepc ype y ooc coco acca aox oe, o ae = 18 B.

ooee epeecx ypoe aoa ao eepocpyyp, coepae 3 co aox oe, paccaoc c oo 8-ooo kp eoa [6] a cyepoepe Cray. Pace oaa ae ypao poex ocooo (195 B) pex opacooex oyex ypoe (~115 B). Beo, paccaa cxea aeao cooecye cepey, oao ce ypo pacee oaac ecoo ye. Ha pecaec, o aoee ececeoe ocee oy ec eyoyoe ae oyppyeo aaa yeo cc, poee eoy yeeaaeo ep aa.

Bopa ac a ocea ye caax coe caoopayxc aox oe. a eco, acoee pe caoopayec T ccee InAs/GaAs paac o exay Cpacoo-pacaoa, caooppyc ooo caaeo co, oa oopoo cocae pepo 1.7 ooco. B oe o oeo py o pya pacooex a oepxoc aocpyyp aox oe, caa co pacpeee o ce oepxoc cpyyp oe paccapac a ypaoa aoa a. Hecop a ceae ae paep caaeo co, eo yepa ( oe o acca T) ooc coco cocoa ayypoa aeoe oeco ocee apa. Oao po caaeo co a oyppyeo peepyapa aoe ocee apa oppoa oe ooc coco acca caoopayxc T o cx op e cea acoe paoe oceaec epe.

B aece opao cpae, ooee eepocpyypa, coepa p co aox oe, epc opa, pecae coo p-n epexo GaAs c pe ypyo ape caa co InAs. Toa coe cocaa 1.2 ooco a e peco o oppoa aox oe. Paccoe ey co 2.8 .

o oapyeo, o p ee poeoo cee pocxo ca oa cepo poooc (Pc. 13), o ocec pe eee ea cc aox caax coe c eee apeoc poaeo epecoo o. eae cceoa eacoc ooe eeG, / paypx o o cee a cpoao acoe, po0.ooooc epe cpyyp c T.

0. cepax poooc eppepyc a o o 3 epeecx ypoe 0.aox ax caax 2 coe, c oopx pocxo cc ocee apa. Ta 0.opao, aoe , cop0 50 100 150 200 2poae 3 caa coT, K oo 1.2 MC, ecy a e aooPc. 13. cepeae cep exaec oe coa poooc caax coe ypo aoa, cc oInAs/GaAs, oyee p ceecee apa c x po x: 1 -1.6 B, 2 -2.0 B, 3 -4.5 B.

oe 3 acyo pooTecoa acoa 1 M.

oc.

paoe oe cepo poooc acca InAs T caax coe InAs coco o, o cepax T ao cac o eepaype acoc o poeoo cee p cpoao acoe epeoo caa, o pe a cepax o caax coe c eee cee e ayy. To a, o opaoe ceee e oo a ayy o cepe, o e a x eepaypoe ooee, ae ocoa oaa, o epeece ypo e c ype.

Opeeee pao Appeyca ae ep aa (17.2 B, 46.8 B 153 B) ae paec e ace o poeoo cee.

Moepoae cepeax cepo ec ooe e cpeco oye oeo opa o apaepax xapaepcax cceyex cpyyp. Ha oepoac cep poooc eoc eepocpyyp, coepax aoe o, c apaepa, opeee pao Appeyca. a o oaao, o cex cyax cepea cep oaaec oee ype.

o a ocec a o aao c ypee cepo DLTS oypooox epx pacopo, aapoac paee ax paoax. Bcece pa op paepo T, peypya y ooc coco x aca oaaec eoopoo ypeo, o oe ocao ye aycca; ypee cepo poooc pocxo o aoe oo poooc oex T, ex papoc ee ep aa EA. coocae oex cepeax cepo oaaec oo oy opa o cee oo ype (Pc. 14). paoooc oca coo y ooc coco ayccoo ye oepaec epee peyaa (c. Pc. 11).

3.2.EA G/, pF G/, pF E DOS 1.x 2.1.1.0.T, K C, pF 0.0.81 82 83 84 0 40 80 1Pc. 14. Cep poooc (cea) apa oya-oya aaca (cpaa) caoopayxc T InAs/GaAs: o cepe;

yp oepoae oooo ypo; coa oepoae ypeo DOS c cepce ayccooo ype = B. co cepea: U = -3.0 B, f = 100 . apaep oepoa: EA = 41.9 B, A = 1.9106 c1K2, T = 50 K.

aee paaec eo apa oya-oya eepocpyyp c T. apaa oya-oya pecae coo apaepecy acoc o cocae eco e o ee eeceo ac, pe oe cocae c y aco paaeoo caa. B pocee cyae peacaopa c oo ocoo pee apaa oya-oya ee oyopyoc.

Aa oaa, o cepeae apa oya-oya caoopayxc aox oe InAs/GaAs e opy pao oyopyoc. o e oce papoco ep aa acce caoopayxc T, o xapaepyec eoopoo ypeo ye ooc epeecx coco. Bea DOS opeeac oepoa oo cepeax pao oya-oya c yeo epepoo ayccooo pacpeee peacaopo (Pc. 14). Taoe e ypee ceye oo cepeax cepo poooc caoopayxc T InAs/GaAs.

Cea aa ocea papaoe ooo cocoa aaa epexox poecco axaa ocee apa acc caopayxc aox oe eoa DLTS axaa.

o e ceao ooe opa, pecae coo oe n+-p-cpyyp c ao p-a a ocoe GaAs c peeo o oepae epye pec, coepae co caoopaoax aox oe InAs. oepa pec caoepoao coe cocaa 21015 c-3. Co aox oe pacoaac a ye 1500 o eaypecoo oaa. p cex ceex o yp oac oeoo apa, o ee oee paao cao ey oepa ocee, yacyx poecce axaa T.

epe eocx epexox poecco cooac eoco oc Boonton 7200 a paoe acoe 1 M yc eepaop Agilent 33250A. aao ocox cee opeec o aay C-V-acoce. eoc aox yco ocox ocee apa appoaac o 1 c o 15 c.

epexoe poecc axaa ocee apa apecppoa o peeo aaoe o eco cey o oe c p epe eepayp o 10 o 140 C, (Pc. 15). O xapaepoac poooo ao o cpae c epexo poecca cc e eoopoe oe o ocex. o oapyeo, o e20 oce epexoe poecc axaa, ooo cco, t, c oc o ecoea xapaep, a ae eoc-20 -10 0 10 ppy cy acoc o eepayp cee.

Pc. 15. epexoe poecc peaHaaea oea ca apepo eoc aocpyopaoc epexox poyp, coepae co aox oecco axaa cc, a e InAs/GaAs, o pe oce oaae o a, o o oy poyooo yca cee c apaepa: Ulow = -1.3 B, Uhigh epe oo e, oo a peo o= -1.2 B. Teepaypa 55.2 .

paoy eocx epexox poecco axaa c oo yxcpoooo (box-car) eppoa (Pc. 16), a o eaec DLTS epex ccox epexox poecco.

oyee a cocoo cep DLTS axama (Pc. 17) e a, opa o ooe o cepa DLTS uccuu, a peya poooooo xapaepa epexox poecco cc axaa. ooo cepa DLTS cc, cepo DLTS axaa DLTS axaa DLTS cc Pc. 16. DLTS-opaoa epexox poecco axaa (cea, ep e) cc (cpaa, cep e) ocee apa T.

Bepa ypa oaa peee ooe cpoo.

DLTS axaa, DLTS cc, Capture DLTS, Emission DLTS, 5 --4 T, -T, K 20 40 60 80 120 40 60 80 1Pc. 17. Cep DLTS axaa cc n+-p-opaa, coepaeo acc caoopayxc T InAs/GaAs. Opaoe ceee U, B: 1 1.6;

2 1.5; 3 1.4; 4 1.2; 5 1.0. Aya yca = 0.1 B, eoc = 1 c. Oo copoc = 562.3 c (axa) 187.4 c (cc).

cac c eee poeoo cee, o oopo o a aaooo poecca, caoo c ypo aoa T.

o cepeao apecppoa a ae ocoa eTeepaypa, Teepaypa, e oepy opyy copoc axaa ocee apa c = nvth coeaoo eepaypoo oe, o aao co copoc cc ocee apa e c yooo ypo:

c E 2 A .

c(T ) = AT exp- (2) kT ec n oepa ocee apa axaaeo epa, c vth x eoa copoc, E oe paccapac aece aA aeo ep aa poecca axaa ocee T.

ocpoee pao Appeyca opeee ep aa epexox poecco axaa cc acoc o poeoo cee.

Bappoae ay yca aoe oaao eee cee ecoeaoc epexox poecco. Ha o ocoe cea o o o, o eoce epexoe poecc axaa ocee oy cy e cocoo opoa epeecx coco acce aox oe.

B aeuu oee copypoa ocoe peya pao.

OCHOBHE PETAT PAOT 1. Papaoa eopeece oco peaoa oec eoo cepoco aaca aoc epoecx apaepo eepocpyyp aoepo: eepoepexoo, aox aox oe.

2. peoea oe oca epoax oypooox eepocpyyp, coepax oe o paepoc, a ocoe caocoacoaoo pee ypae peepa yaccoa. Oeo ocoeoc oe ec peee oceoaeoo aoo-exaecoo oxoa p oca cepa cax coox ocee apa oac aoo .

3. Papaoao popaoe oeceee, ooee poo oepoae o-apax xapaepc oypooox eepocpyyp c ao a opee ocoe epoece apaep aox .

4. Opeeea oooa acoc e papa o poooc apex aox ccee InxGa1-xAs/GaAs aaoe cocao ceoopoo poca co epoo pacopa o 6.o 29% o In, oopa ocaec apao ye o cocaa:

EC = 0.85x - 0.3x2.

5. Opeee ocoe xapaepc aocpyyp c oo a ocoe eepocce InxGa1-xAs/GaAs pa cocao aaoe 0.065 < x < 0.29, ae a: po a o poooc, ep ypoe paepoo aoa, cooecye ooe y, po ocox ocee apa, pocpaceoe pacpeeee oeaa, ea cpoeoo epecoo o.

6. peoe coco opeee ooc epeecx coco acca caoopayxc aox oe aaa cepo poooc, cx p pax poex ceex. oye oecee ae o y ooc coco caoopayxc aox oe InAs/GaAs.

7. Opeee apaep epooo cepa caax coe aox oe InAs/GaAs, poeeo cpaee e apa, aoeoo caax cox acce aox oe, oxapaepoaa po caax coe caoopayxc aox oe a oyppyeo aaa axaa ocee apa.

8. C oo ecaoapo eoco cepoco epe apecppoa epexoe poecc axaa ocee apa acc caoopayxc aox oe, oye oecee aece xapaepc oo poecca.

9. peoe eo - DLTS axaa - pecpa axaa ocee apa acc aox oe. Opeee yco eo ae aapaypo aaca.

pyea epaypa:

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