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1 6. , Al0.4Ga0.6N/GaN ~51017 ~11018 -3, .

7. , AlxGa1-xN:Si 2026 0,56

8. , - GaN:(Mg+) Al0.08Ga0.92N:(Mg+), , 20020 14520 250 19520 , , Mg/O = 40.

9. , Mg 21020 c-3 21019 -3 GaN AlN, , 780820 .

10. , AlN/Al0.08Ga0.92N , , - .

11. , AlxGa1-xN AlN/AlGaN / CF4/Ar = 20/4 sccm, (ICP)=300 , (RIE)=150 , = 10 0x1.

12. , AlGaN-GaN , 1 , : Si = (I2 /f) . A/ Ao, A0 , A , 1, f .

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