WWW.DISSERS.RU

...
    !

 >> 
Pages:     | 1 |   ...   | 2 | 3 ||

, 7. Role of magnetic field configuration in a performance of extended magnetron . , sputtering system with a cylindrical cathode / H.-G. Chun, N.S. Sochugov, J.-Z. You, , 50-60 . A.A. Soloviev, A.N. Zakharov // Journal of the Korean society of semiconductor , equipment technology, V.2, 3, 2003, p. 19-24.

8. Properties of nanolayered carbon films deposited by unbalanced magnetron , sputtering deposition / K.V.Oskomov, S.V. Rabotkin, N.S. Sochugov, A.A. Soloviev . // in proceedings of 7th international conference on modification of materials with 5. particle beams and plasma flows, Tomsk, June 25-29, 2004, p. 409-412.

9. Installation for hard carbon films deposition on large area substrates / N.S.

( 1 2) . Sochugov, A.A.Soloviev, S.V. Rabotkin, I.R. Arslanov, K.V.Oskomov, V.G.

, Podkovirov, and N.F. Kovsharov / in proceedings of 7th international conference on , modification of materials with particle beams and plasma flows, Tomsk, June 25-29, 2004, p. 85-88.

, 10. Ellipsometric studies of thin silver films deposited by DC magnetron sputtering / A.A. Soloviev, N.S. Sochugov, K.V. Oskomov // . . . -2006. -8.

. . . 488-490.

11. . 2242821 20.12. .

, 1. A.A. Solovjev, S.P. Bugaev, A.N. Zakharov, K.V. Oskomov, and N.S. Sochugov, Plasma-immersion ion deposition of amorphous hydrogenated diamond-like films on dielectric substrates/ in proceedings of 5th Conference on Modification of Materials with Particle Beams and Plasma Flows, Tomsk, 2000.

Pages:     | 1 |   ...   | 2 | 3 ||
 >> 






2011 www.dissers.ru -